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Process evaluation Product List

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Low-damage processing and polishing processes and evaluation of SiC and GaN wafer substrates.

Low-damage processing and polishing processes and evaluation of SiC and GaN wafer substrates.

Latest polishing technology for various GaN/SiC related materials with high hardness and brittleness.

★What does the future hold for technologies that support large-diameter processing and mass production techniques? ★We will also introduce the characteristics of the residual processing altered layer remaining during SiC wafer processing, its impact on subsequent processes, and analysis techniques for the altered layer. ★We are currently conducting a pre-content request service! We welcome your practical challenges! 【Venue】 Tekno Kawasaki, 5th Floor, 5th Training Room【Kanagawa, Kawasaki】 【Date and Time】 September 17, 2013 (Tuesday) 11:00-15:45 【Instructors】 Part 1: Dr. Tomohisa Kato, Team Leader and Senior Researcher, Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST) Here is the homepage of the Advanced Power Electronics Research Center. Part 2: Representative from Namiki Precision Jewel Co., Ltd., NJC Technology Research Institute Part 3: Professor Kazuto Yamauchi, Graduate School of Engineering, Osaka University

  • Company：AndTech
  • Price：10,000 yen-100,000 yen
  • Technical Seminar
  • Process evaluation

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Small Halogen-Compatible Furnace | High-Temperature Process Evaluation Using F-Series and Cl-Series Gases

Small Halogen-Compatible Furnace | High-Temperature Process Evaluation Using F-Series and Cl-Series Gases

Suppressing concerns about degradation and leaks of furnace materials due to corrosive gases, safely examining halogen atmosphere testing.

In high-temperature processes involving halogen gases (such as F and Cl series), common electric furnaces may face issues with corrosion and degradation of heaters, furnace materials, piping, and sealing materials. Particularly in surface treatment, etching, cleaning, and reaction evaluation using fluorine or chlorine gases, it is crucial to design equipment that includes corrosion resistance of furnace materials, exhaust and emission control, and gas leakage prevention. Our small halogen-compatible furnace is a test furnace designed to examine high-temperature processing using corrosive gases on a small scale. We can consider configurations tailored to applications, including corrosion-resistant materials, scrubber integration, interlocks, and safety equipment. **Features** - Compatible with halogen gas atmospheres such as F and Cl series - Consideration of furnace materials, piping, and sealing configurations for corrosive gases - Integration with scrubbers, gas detection, and emergency shutdown systems is possible - Pre-evaluation of temperature, gas concentration, and processing time in a small furnace - Support for process feasibility confirmation before mass production furnace introduction *For more details, please download the materials or contact us.*

  • Electric furnace
  • Process evaluation

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